Name of Gas
(%)
Purity
м(ppm)
Impurities
()
Cylinder

Contents
԰
Valve Outlet
HCl 99.999 O<1, N<1
CO<1, HO<1
10 5kg 22-14ߣ
47 25kg
Cl 99.999 O+ N<2
CO<2, HO<1
1 1kg 22-14ߣ
10 10kg
47 50kg
47 25kg
BCl 99.999 Ni<0.001, Mn<0.001
Fe<0.004
1(SUS) 1kg 22-14ߣ
10(SUS) 10kg
47(SUS) 50kg
CCl 99.999 O<1, N<1
CO<1, HO<5
1 1kg 22-14ߣ
10 10kg
NF 99.99 O<5, N<5, SF6<1
CO<5, HO<5, HF<1
NO<5, CF<40
3.5 0.3kg 22-14ߣ
10 1kg
47 5kg
47 25kg
SF6 99.999 Air<10, CF<10
<0.1, HO<1
10 10kg 22-14ߣ
47 40kg
CF 99.999 O<5, N<10, THC<1
CO<1, HO<2, HF<0.4
10 7kg 22-14ߣ
47 32kg
CHF 99.999 O+ N<50
HF<0.1, HO<5
10 5kg 22-14ߣ
47 20kg
47 25kg
CF6 99.999 O<10, N<25, HF<1
CO<2, HO<5, CO<1
47 30kg 22-14ߣ
 
 
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