가스명
Name of Gas
순도(%)
Purity
조성
Composition
용기(ℓ)
Cylinder
충전량
Contents
밸브규격
Valve Outlet
B2H6
(디보란)
99.995 O₂<1, N₂<5,
H.C<1, CO₂<20,
H₂O<1, CO<5
10 혼합가스 φ22-14山 右
47
PH₃
(포스핀)
99.999 O₂<1, N₂<1,
CO₂<1, CH4<1,
H₂O<1, CO<1
10 " φ22-14山 右
47 "
AsH₃
(아신)
99.9995 O₂<1, N₂<1,
CO₂<0.5, H.C<0.5,
H₂O<1, CO<0.5
10 " φ22-14山 右
47 "
 
 
 
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