| |
°¡½º¸í
Name of Gas |
Á¶¼º
Composition |
¿ë±â(§¤)
Cylinder |
ÃæÀü·®
Contents |
¹ëºê±Ô°Ý
Valve Outlet |
| HCl - He |
HCl 5%, He BALANCE |
10 |
1§© |
¥õ22-14ߣ
éÓ |
| 47 |
5§© |
| F©ü - He |
F©ü5%, He BALANCE |
10 |
1§© |
¥õ22-14ߣ
éÓ |
| 47 |
5§© |
| CO-N©ü-CO©ü-He |
CO 2% + N©ü8%
+ CO©ü8% + He BALANCE |
47 |
5§© |
¥õ22-14ߣ
éÓ |
| N©ü-CO©ü-He |
N©ü13.5-20%, CO©ü4.5-6%
He Balance |
|
|
|
| F©ü-Ar-Ne |
F©ü0.1-10%, Ar 1-25%
Ne BALANCE |
10 |
1§© |
¥õ22-14ߣ
éÓ |
| 47 |
5§© |
| HCl-Xe-H©ü-Ne |
HCl 0.1-1.0%, Xe1-10%
H©ü0.2-0.25%, Ne BALANCE |
10 |
1§© |
¥õ22-14ߣ
éÓ |
| 47 |
5§© |
|
| |
| |
   |
|
